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Wet Oxidation of Poly-Si1-xGex Layer Grown on SiO2/Si
Han, Ping, Wu, Mang, Ma, Junru, Huang, XiaoDong, Chen, Hao, Hu, Liqun, Zheng, YoudouVolume:
472
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-472-343
Date:
January, 1997
File:
PDF, 271 KB
english, 1997