In-Situ Tem-Investigations of Electromigration Induced Mass...

MRS Proceedings 1997 / 1 Vol. 473

In-Situ Tem-Investigations of Electromigration Induced Mass Transport in “Near-Bamboo” Al-Interconnects

Heinen, Dirk, Schroeder, Herbert, Schilling, Werner
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Volume:
473
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-473-375
Date:
January, 1997
File:
PDF, 1.88 MB
english, 1997
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