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Dependence of Strain and Plasticity During Thermal Cycling of Different Aluminum Metallization on Alloy Composition, Passivation Material and Passivation Geometry
Nielen, Heiko, Göbel, Herbert, Eppler, Ingo, Schroeder, Herbert, Schilling, WernerVolume:
473
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-473-435
Date:
January, 1997
File:
PDF, 1.20 MB
english, 1997