Effects of Electron Beam Exposure on Poly(Arylene Ether)...

MRS Proceedings 1997 / 1 Vol. 476

Effects of Electron Beam Exposure on Poly(Arylene Ether) Dielectric Films

Drage, J. S., Yang, J. J., Choi, D. K., Katsanes, R., Lau, K. S. Y., Wang, S.-Q., Forester, L., Schilling, P. E., Ross, M.
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Volume:
476
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-476-121
Date:
January, 1997
File:
PDF, 442 KB
english, 1997
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