Chemical-Mechanical Polishing of Polymer Films: Comparison...

MRS Proceedings 1997 / 1 Vol. 476

Chemical-Mechanical Polishing of Polymer Films: Comparison of Benzocyclobutene(BCB) and Parylene-N Films by XPS and AFM

Yang, G.-R., Zhao, Y.-P., Neirynck, Jan M., Murarka, Shyam P., Gutmann, Ronald J.
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Volume:
476
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-476-161
Date:
January, 1997
File:
PDF, 611 KB
english, 1997
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