Effect of Deposition and Annealing on The Thermomechanical...

Effect of Deposition and Annealing on The Thermomechanical Properties of Parylene Films

Todd Ryan, E., Miller, Mikel, Ho, Paul S.
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Volume:
476
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-476-225
Date:
January, 1997
File:
PDF, 348 KB
english, 1997
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