Properties of New Low Dielectric Constant Spin-on Silicon Oxide based Polymers
Hacker, Nigel P., Davis, Gary, Figge, Lisa, Krajewski, Todd, Lefferts, Scott, Nedbal, Jan, Spear, RichardVolume:
476
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-476-25
Date:
January, 1997
File:
PDF, 303 KB
english, 1997