Organic Contamination of Silicon Wafer in Clean Room Air...

MRS Proceedings 1997 / 1 Vol. 477

Organic Contamination of Silicon Wafer in Clean Room Air and its Impact to Gate Oxide Integrity

Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S.
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Volume:
477
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-477-101
Date:
January, 1997
File:
PDF, 774 KB
english, 1997
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