Investigation of the Need for Alternative cleaning...

MRS Proceedings 1997 / 1 Vol. 477

Investigation of the Need for Alternative cleaning Chemistries for 30Å Gate Oxides

Bayoumi, Amr, Fischer-Colbrie, Alice, Parker, Russ, Cox, Mike, Greene, Wayne
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Volume:
477
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-477-247
Date:
January, 1997
File:
PDF, 1.51 MB
english, 1997
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