The Formation of Water Marks on Both Hydrophilic and...

MRS Proceedings 1997 / 1 Vol. 477

The Formation of Water Marks on Both Hydrophilic and Hydrophobic Wafers

Park, Jin-Goo, Han, Jeung-Hoon, Kim, Seung-Hwan, Lee, Sang-Ho
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Volume:
477
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-477-513
Date:
January, 1997
File:
PDF, 999 KB
english, 1997
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