Surface Treatment with UV-Excited Radicals for...

Surface Treatment with UV-Excited Radicals for Highly-Reliable Gate Dielectrics

Ito, Takashi, Sugino, Rinji, Nakanishi, Toshiro, Ohkubo, Satoshi, Tamura, Yasuyuki, Takasaki, Kanetake
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
477
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-477-71
Date:
January, 1997
File:
PDF, 2.58 MB
english, 1997
Conversion to is in progress
Conversion to is failed