Impact of Metal Contamination of 7.0nm Gate Oxides on...

MRS Proceedings 1997 / 1 Vol. 477

Impact of Metal Contamination of 7.0nm Gate Oxides on Various Substrate Materials

Saito, S., Hamada, K., Eaglesham, D. J., Shiramizu, Y., Benton, J. L., Kitajima, H., Jacobson, S. D. C., Poate, J. M.
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Volume:
477
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-477-81
Date:
January, 1997
File:
PDF, 372 KB
english, 1997
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