Low Temperature GaN Growth on Nitridated Sapphire Using...

MRS Proceedings 1997 / 1 Vol. 482

Low Temperature GaN Growth on Nitridated Sapphire Using Remote Plasma Enhanced Ultrahigh Vacuum Chemical Vapor Deposition

Kim, Dong-Jun, Kim, Kyoung-Kook, Paek, Jong-Sik, Yi, Min-Su, Noh, Do-Young, Kim, Hyo-Gun, Park, Seong-Ju
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Volume:
482
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-482-161
Date:
January, 1997
File:
PDF, 305 KB
english, 1997
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