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Nitridation Of Sapphire Substrate Using Remote Plasma Enhanced-Ultrahigh Vacuum Chemical Vapor Deposition At Low Temperature
Paek, Jong-Sik, Kim, Kyoung-Kook, Lee, Ji-Myon, Kim, Dong-Jun, Kim, Hyo-Gun, Park, Seong-JuVolume:
482
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-482-81
Date:
January, 1997
File:
PDF, 960 KB
english, 1997