Formation of Silicon Nanocrystallites by Electron Cyclotron...

MRS Proceedings 1997 / 1 Vol. 486

Formation of Silicon Nanocrystallites by Electron Cyclotron Resonance Chemical Vapor Deposition and Ion Beam Assisted Electron Beam Deposition

Kim, Eun Kyu, Choi, Won Chel, Min, Suk-Ki, Park, Chong-Yun
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Volume:
486
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-486-231
Date:
January, 1997
File:
PDF, 972 KB
english, 1997
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