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Composition dependence of room temperature 1.54μm Er3+ luminescence from erbium doped silicon:oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
Shin, Jung H., Kim, Mun-Jun, Seo, Se-Young, Lee, ChoochonVolume:
486
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-486-275
Date:
January, 1997
File:
PDF, 1.03 MB
english, 1997