A New Practical Approach to Implement a Transient Enhanced Diffusion Model into an Fem-Based 2-D Process Simulator
Sugiyasu, Noriyuki, Suzuki, Kaina, Kojima, Syuichi, Ohyama, YasushiVolume:
490
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-490-15
Date:
January, 1997
File:
PDF, 715 KB
english, 1997