Computationally Efficient Model for 2D Ion Implantation...

Computationally Efficient Model for 2D Ion Implantation Simulation

Temkin, Misha, Chakarov, Ivan
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Volume:
490
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-490-27
Date:
January, 1997
File:
PDF, 495 KB
english, 1997
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