An Optimized Process and Characterization of Pb(Zr,Ti)O3...

MRS Proceedings 1997 / 1 Vol. 493

An Optimized Process and Characterization of Pb(Zr,Ti)O3 Ferroelectric Capacitor for 1T/1C Ferroelectric RAM

Shin, Dong-Won, Shin, Soo-Ho, Lee, Jin-Woo, Park, Hong-Bae, Chun, Yoon-Soo, Lee, Mi-Hyang, Jung, Dong-Jin, Hwang, Yoo-Sang, Koo, Bon-Jae, Lee, Sung-Young, Kim, Kinam
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Volume:
493
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-493-281
Date:
January, 1997
File:
PDF, 1.69 MB
english, 1997
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