Preparation of Boron Nitride Thin Films by MOCVD

MRS Proceedings 1997 / 1 Vol. 495

Preparation of Boron Nitride Thin Films by MOCVD

Lee, Sang-Yeol, Jin, Yong-Gi, Nam, Young-Woo, Lee, Joong Kee, Park, Dalkeun
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Volume:
495
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-495-119
Date:
January, 1997
File:
PDF, 925 KB
english, 1997
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