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Chemical Vapor Deposition of Strontium Ruthenate Thin Films from Bis(2, 4-Dimethylpentadienyl) Ruthenium and Bis(Tetramethylheptanedionato) Strontium
Breitkopf, Richard, Meda, Lamartine J., Haas, Terry, Kirss, Rein U.Volume:
495
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-495-51
Date:
January, 1997
File:
PDF, 259 KB
english, 1997