Effects of substrate bias on the properties of a-C:H films...

MRS Proceedings 1997 / 1 Vol. 498

Effects of substrate bias on the properties of a-C:H films by DC saddle-field plasma enhanced CVD

Yoo, Young-Zo, Kim, HyoGun, Jang, HongKyu, Jeong, YoungGeun, Kima, Geunsik
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Volume:
498
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-498-171
Date:
January, 1997
File:
PDF, 365 KB
english, 1997
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