Enhancement of Adhesion Between Cu Thin Film and Polyimide...

Enhancement of Adhesion Between Cu Thin Film and Polyimide Modified by Ion Assisted Reaction

Choi, S. C., Kim, K. H., Jung, H-J., Whang, C. N., Koha, S. K.
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Volume:
504
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-504-437
Date:
January, 1997
File:
PDF, 1.29 MB
english, 1997
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