Fem Simulation of Micro-Rotating-Structures and Their...

MRS Proceedings 1997 / 1 Vol. 505

Fem Simulation of Micro-Rotating-Structures and Their Applications in Measurement of Residual Stresses in Thin Films

Zhang, Xin, Zhang, Tong-Yi, Zohar, Yitshak
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Volume:
505
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-505-21
Date:
January, 1997
File:
PDF, 1.14 MB
english, 1997
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