Correlation of Stress With Photo-Degradation in...

MRS Proceedings 1997 / 1 Vol. 505

Correlation of Stress With Photo-Degradation in Hydrogenated Amorphous Silicon Prepared by Hot-Wire CVD

Han, Daxing, Gotoh, Tamihiro, Nishio, Motoi, Sakamoto, Tomonari, Nonomura, Shuichi, Nitta, Shoji, Wang, Qi, Iwaniczko, Eugene
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Volume:
505
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-505-445
Date:
January, 1997
File:
PDF, 464 KB
english, 1997
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