Fracture Tests Of Polysilicon Film

MRS Proceedings 1997 / 1 Vol. 505

Fracture Tests Of Polysilicon Film

Sharpe, W. N., Yuan, B., Edwards, R. L.
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Volume:
505
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-505-51
Date:
January, 1997
File:
PDF, 1.38 MB
english, 1997
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