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High Conductivity Gate Metallurgy for Tft/Lcd's
Fryer, Peter M., Colgan, E., Galligan, E., Graham, W., Horton, R., Jenkins, L., John, R., Kuo, Y., Latzko, K., Libsch, F., Lien, A., Nywening, R., Polastre, R., Rothwell, M. E., Wilson, J., Wisnieff,Volume:
507
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-507-37
Date:
January, 1998
File:
PDF, 4.20 MB
english, 1998