Large Area Deposition of Amorphous and Microcrystalline...

MRS Proceedings 1998 / 1 Vol. 507

Large Area Deposition of Amorphous and Microcrystalline Silicon by Very High Frequency Plasma

Sansonnens, L., Howling, A. A., Hollenstein, Ch.
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Volume:
507
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-507-541
Date:
January, 1998
File:
PDF, 1.22 MB
english, 1998
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