Dust Particle Diagnostics in Rf Plasma Deposition of...

MRS Proceedings 1998 / 1 Vol. 507

Dust Particle Diagnostics in Rf Plasma Deposition of Silicon and Silicon Oxide Films (Invited)

Hollenstein, Ch., Howling, A. A., Courteille, C., Dorier, J.-L., Sansonnens, L., Magni, D., Müller, H.
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Volume:
507
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-507-547
Date:
January, 1998
File:
PDF, 2.36 MB
english, 1998
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