How do Impurities Affect the Growth of μc-Si:H?

MRS Proceedings 1998 / 1 Vol. 507

How do Impurities Affect the Growth of μc-Si:H?

Kamei, Toshihiro, Fukawa, Makoto, Nishimiya, Tatsuyuki, Isomura, Masao, Kondo, Michio, Matsuda, Akihisa, Claflin, B., Lucovsky, G.
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Volume:
507
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-507-867
Date:
January, 1998
File:
PDF, 980 KB
english, 1998
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