Raman and Spectroscopic Ellipsometry Studies of P-Doped...

MRS Proceedings 1998 / 1 Vol. 507

Raman and Spectroscopic Ellipsometry Studies of P-Doped Poly-Si

Zollner, Stefan, Liu, Ran, Christiansen, Jim, Chen, Wei, Monarch, Kathy, Lee, Tan-Chen, Singh, Rana, Yater, Jane, Paulson, Wayne M., Feng, Chris
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Volume:
507
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-507-957
Date:
January, 1998
File:
PDF, 428 KB
english, 1998
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