Structural Properties of Polycrystalline Silicon Films...

MRS Proceedings 1998 / 1 Vol. 507

Structural Properties of Polycrystalline Silicon Films Formed by Pulsed Rapid Thermal Processing

Wang, Yongqian, Liao, Xianbo, Diao, Hongwei, He, Jie, Ma, Zhixun, Yue, Guozhen, Sheng, Shuran, Kong, Guanglin, Zhao, Yuwen, Li, Zhongming, Yun, Feng
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Volume:
507
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-507-975
Date:
January, 1998
File:
PDF, 958 KB
english, 1998
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