A Dehydrogenation and Annealing Method of a-Si by Microwave

MRS Proceedings 1998 / 1 Vol. 508

A Dehydrogenation and Annealing Method of a-Si by Microwave

Park, C-M, Jeon, J-H, Kim, C-H, Han, M-K
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Volume:
508
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-508-115
Date:
January, 1998
File:
PDF, 867 KB
english, 1998
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