Limiting Factors of Backside External Gettering by Nanocavities and Aluminum-Silicon Alloying in Silicon Wafers
Gay Henquinet, N., Martinuzzi, S.Volume:
510
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-510-221
Date:
January, 1998
File:
PDF, 1.49 MB
english, 1998