Smart-Cut® Technology: an Industrial Application of Ion...

MRS Proceedings 1998 / 1 Vol. 510

Smart-Cut® Technology: an Industrial Application of Ion Implantation Induced Cavities

Aspar, B., Lagahe, C., Moriceau, H., Soubie, A., Bruel, M., Auberton-Hervé, A.J., Barge, T., Maleville, C.
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Volume:
510
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-510-381
Date:
January, 1998
File:
PDF, 3.35 MB
english, 1998
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