A Novel Detection System for Defects and Chemical Contamination in Semiconductors Based Upon the Scanning Kelvin Probe
Lägel, Bert, Baikie, Iain D., Petermann, UweVolume:
510
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-510-619
Date:
January, 1998
File:
PDF, 1.01 MB
english, 1998