Nanoporous Silica For Low K Dielectrics
Ramos, T., Rhoderick, K., Roth, R., Brungardt, L., Wallace, S., Drage, J., Dunne, J., Endisch, D., Katsanes, R., Viemes, N., Smith, D. M.Volume:
511
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-511-105
Date:
January, 1998
File:
PDF, 1.74 MB
english, 1998