Ion Beam Techniques for Low K Materials Characterization

MRS Proceedings 1998 / 1 Vol. 511

Ion Beam Techniques for Low K Materials Characterization

Bakhru, H., Kumar, A., Kaplan, T., Delarosa, M., Fortin, J., Yang, G.-R., Lu, T.-M., Kim, S., Steinbruchel, C., Tang, X., Moore, J. A., Wang, B., McDonald, J., Nitta, S., Pisupatti, V., Jain, A., Wayn
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Volume:
511
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-511-125
Date:
January, 1998
File:
PDF, 631 KB
english, 1998
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