Adhesion Energy Measurements of Multilayer Low-K Dielectric...

MRS Proceedings 1998 / 1 Vol. 511

Adhesion Energy Measurements of Multilayer Low-K Dielectric Materials for ULSI Applications

Shaffer, E. O., Mills, M. E., Hawn, D., Van Gestel, M., Knorr, A., Gundlach, H., Kumar, K., Kaloyeros, A. E., Geer, R. E.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
511
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-511-133
Date:
January, 1998
File:
PDF, 338 KB
english, 1998
Conversion to is in progress
Conversion to is failed