Polymer/metal Interfaces in Interconnect Structures:...

MRS Proceedings 1998 / 1 Vol. 511

Polymer/metal Interfaces in Interconnect Structures: Moisture Diffusion and Stress Corrosion Effects

Ma, Qing, Tran, Quan, Pan, Chuanbin, Fujimoto, Harry, Chiang, Chien
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Volume:
511
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-511-329
Date:
January, 1998
File:
PDF, 1.93 MB
english, 1998
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