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Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses
Cook, Robert F., Liniger, Eric G., Klaus, David P., Simonyi, Eva E., Cohen, Stephan A.Volume:
511
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-511-33
Date:
January, 1998
File:
PDF, 552 KB
english, 1998