Dry Etching Damage Effect on Ohmic Characteristics of GaN
Khim, Jin Seok, Kim, Taek, Chae, Su Hee, Kim, Tae Il, Kim, Hyon-Soo, Yeom, Geun-YoungVolume:
512
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-512-495
Date:
January, 1998
File:
PDF, 323 KB
english, 1998