Deuterium Diffusion, Trapping and Stability in Buried Silicon Dioxide Layers
Boutry-Forveille, A., Nazarov, A., Ballutaud, D.Volume:
513
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-513-319
Date:
January, 1998
File:
PDF, 997 KB
english, 1998