Selective Rapid Thermal Chemical Vapor Deposition of Titanium Silicide on Arsenic Implanted Silicon
Fang, Hua, Özttirk, Mehmet C., Seebauer, Edmund G.Volume:
514
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-514-231
Date:
January, 1998
File:
PDF, 971 KB
english, 1998