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Process Design & Integration of Salicide and Source/Drain process Modules for Improved Device Performance
Apte, Pushkar P., Saxena, Shared, Rao, Suraj, Vasanth, Karthik, Prinslow, Douglas A., Kittl, Jorge A., Breedijk, Terence, Pollack, GordonVolume:
514
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-514-251
Date:
January, 1998
File:
PDF, 519 KB
english, 1998