The Influence of Capping Layer Type on Cobalt Salicide...

MRS Proceedings 1998 / 1 Vol. 514

The Influence of Capping Layer Type on Cobalt Salicide Formation in Films and Narrow Lines

Besser, P. R., Lauwers, A., Roelandts, N., Maex, K., Blum, W., Alvis, R., Stucchi, M., Potter, M. De
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Volume:
514
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-514-375
Date:
January, 1998
File:
PDF, 777 KB
english, 1998
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