The Best Way to Obtain Good Quality CVD-TiN Films from TiCl4 and NH3
Hamamura, Hirotaka, Shimogaki, Yukihiro, Akiyama, Yasunobu, Egashira, Yasuyuki, Komiyama, HiroshiVolume:
514
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-514-501
Date:
January, 1998
File:
PDF, 797 KB
english, 1998