Chemical Vapor Deposition of Tantalum Nitride Films Using Pentakis(Diethylamido)Tantalum and Ammonia
Cho, Sung-Lae, Kim, Ki-Bum, Min, Seok-Hong, Shin, Hyun-KookVolume:
514
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-514-531
Date:
January, 1998
File:
PDF, 1.70 MB
english, 1998