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Investigations of Electromigration Failure by Electrical Measurement and Scanning Probe Microscopy With Additional Simulation
Fabricius, Alexander, Breternitz, Volkmar, Knedlik, Christian, Henning, Andreas, Liebscher, Eckhard, Vogel, SilviaVolume:
516
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-516-27
Date:
January, 1998
File:
PDF, 763 KB
english, 1998