Channel Cracking Technique for Toughness Measurement of Brittle Dielectric Thin Films on Silicon Substrates
Ma, Qing, Xie, Joseph, Chao, Sam, El-Mansy, Safaa, Mcfadden, Robert, Fujimoto, HarryVolume:
516
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-516-331
Date:
January, 1998
File:
PDF, 1.25 MB
english, 1998